Nicolet iG50


Nicolet iG50自動(dòng)化晶圓分析系統(tǒng)集Nicolet FTIR核心光譜技術(shù)優(yōu)勢(shì)，專為半導(dǎo)體晶圓片的自動(dòng)化分析而設(shè)計(jì)。產(chǎn)品基于功能強(qiáng)大的Nicolet iG50工業(yè)化光譜分析平臺(tái)，能完美的滿足Wafer生產(chǎn)過程質(zhì)量控制、產(chǎn)品研發(fā)的測(cè)試應(yīng)用需求。


iG50-Tabletop System


尺寸mm1000w x 1165d x 1590h

iG50-200 6/8-inch Wafer Measurement System 6/8寸晶圓量測(cè)


尺寸mm 1400w x 1150d x 1710h

尺寸mm 1470w x 1530d x 1830h

尺寸mm 1985w x 1500d x 1830h

iG50-300 12-inch Wafer Measurement System 12寸晶圓量測(cè)

尺寸mm 1470w x 1486d x 1830h

尺寸mm 1470w x 1530d x 1830h

尺寸mm 1985w x 1500d x 1830h

iG50-Oi Ingot Measurement System 硅Oi量測(cè)


尺寸mm 4800w x 1515d x 1822h

PC機(jī)架尺寸mm 660w x 600d x 480h

應(yīng)用領(lǐng)域

  • Epitaxial Thickness

  • Carbon & Oxygen in Silicon

  • Boron & Phosphorus in BPSG or PSG Films

  • Hydrogen in Silicon Nitride

  • Fluorine in Silicon Oxside Films

  • Multi Background Option

  • GEM/SECS Host Communication

  • Share File Host Communication

  • Double Station Sorting Support

  • Four Station Sorting Support

  • Six Station Sorting Support

  • Hydrogen in Silicon Software

  • SiC Epitaxial Thickness Support

可定制方案

  • 200mm wafer adapter for FOUP system

  • Tag Reader for FOUP & SMIF system

    • Keyence: BL600

    • Omron: V640E84


  • E84 OHT Support for OHT COM module

  • Safety Light Curtain for OHT

  • Sensing lonizer System

  • Water ID Reader Module

  • Optical FFU (Fan Filter Unit)

  • Share File Host Communication